DeBusk, Damon K.: search on Z-Library

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1

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Determination of COP distribution after SC1 cleaning by a laser particle counter

Fujise, T., Yanase, Y., Hourai, M., Sano, M., Tsuya, Hideki, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 400 KB

english, 1996

2

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Contaminant sources causing non-stick-on-pad during die bonding

Posey, Dan E., Hossain, Tim Z., DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 119 KB

english, 1997

3

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Combined spectroscopic ellipsometry and reflectometry for advanced semiconductor fabrication metrology

McGahan, William A., Spady, Blaine R., Iacoponi, John A., Williams, John D., DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 373 KB

english, 1996

4

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Spectrophotometry and beam profile reflectometry measurement of six layers in an SOI film stack

Leng, JingMin, Sidorowich, John J., Yoon, Y. D., Opsal, Jon L., Lee, B. H., Cha, Giho, Moon, Joo-Tae, Lee, Sang-In, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 131 KB

english, 1996

5

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Productivity improvement through industrial engineering in the semiconductor industry

Meyersdorf, Doron, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 439 KB

english, 1996

6

Measuring Diffusion Lengths in Epitaxial Silicon by Surface Photovoltage

Lowell, John, Wenner, Valerie, Debusk, Damon

Journal:

MRS Proceedings

Year:

1995

Language:

english

File:

PDF, 246 KB

english, 1995

7

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Evaluation of lifetime and Hi-Q modules in surface charge analysis

Lin, Fuyu, Burt, Curtis, Schay, Pat, Stih, John, John, Jay, Hampton, Freddie L., DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 228 KB

english, 1997

8

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Rapid in-fab monitoring of ion implant doses using total x-ray fluorescence

Weiss, Cornelia A., Hossain, Tim Z., Zschech, Ehrenfried, MacDonald, Brian J., DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 1.26 MB

english, 1997

9

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Cyclic I-V and Q-V: new measurement techniques for monitoring processes and processing-induced damage

Okandan, Murat, Fonash, Stephen J., Werking, James, DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 1.09 MB

english, 1997

10

An Optical Approach to Evaluating the Effects of Chlorine on the Quality Of Si/SiO2 Interfaces

Sherry, Julia, Lowell, John, Hossain, Tim, Debusk, Damon

Journal:

MRS Proceedings

Year:

1996

Language:

english

File:

PDF, 1.55 MB

english, 1996

11

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Electrical defect density modeling for different technology nodes, process complexity, and critical areas

Winter, Tom, DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 255 KB

english, 1997

12

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II - Contact potential difference methods for full wafer characterization of Si/SiO2 interface defects induced by plasma processing

Edelman, Piotr, Savchouk, A., Wilson, M., Jastrzebski, Lubek, Lagowski, Jacek J., Nauka, Christopher, Ma, Shawming, Hoff, Andrew M., DeBusk, Damon K., Ajuria, Sergio A., Hossain, Tim Z.

Year:

1998

Language:

english

File:

PDF, 1.86 MB

english, 1998

13

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Mode structure laser radiation influence on the periodical surface structures intracavity production

Valyavko, Vasily V., Osipov, Vladimir P., DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 551 KB

english, 1996

14

SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] In-Line Methods and Monitors for Process and Yield Improvement - COCOS oxide film characterization and monitoring

Hoff, Andrew M., DeBusk, Damon K., Schanzer, Robert W., Ajuria, Sergio A., Jakubczak, Jerome F.

Year:

1999

Language:

english

File:

PDF, 432 KB

english, 1999

15

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Defect characterization and light scattering by PSL spheres on tungsten CMP wafers

Ding, Ping, Starr, Greg W., Chowdhury, Rina, Hirleman, E. Dan, DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 887 KB

english, 1997

16

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Process damage in single-wafer cleaning process

Nadahara, Soichi, Saki, Kazuo, Tomita, Hiroshi, DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 306 KB

english, 1997

17

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Thermal wave analysis of the formation of titanium disilicide on submicron lines

Brun, Alain, Gerritsen, Eric, Brun, Nicole, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 285 KB

english, 1996

18

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Implementation of in-line Fowler-Nordheim testing for tunnel oxide thickness determination in manufacturing

John, Laura D., Cosway, Richard G., Griswold, Mark D., Lamb, Gerald M., DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 275 KB

english, 1997

19

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Computer simulation for estimation of dislocation multiplication due to gravitational stress: challenges and opportunities toward slip-free 300-mm-diameter silicon wafers for ultralarge-scale integr

Shimizu, Hirofumi, Isomae, Seiichi, Minowa, Kyoko, Satoh, Tomomi, DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 674 KB

english, 1997

20

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - In-line charge-trapping characterization of dielectrics for sub-0.5-um CMOS technologies

Roy, Pradip K., Chacon, Carlos M., Ma, Yi, Horner, Gregory, DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 528 KB

english, 1997

21

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Process monitoring of ultrathin oxides using surface charge analysis

Field, Alan H., DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 217 KB

english, 1997

22

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Noncontact surface-resistivity measurements on production wafers

Liberman, Sergey, DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 123 KB

english, 1997

23

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Real-time preparation-free imaging of mobile charge in SiO2

Jastrzebski, Lubek, Edelman, Piotr, Lagowski, Jacek J., Hoff, Andrew M., Savchouk, A., Persson, Eric, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 533 KB

english, 1996

24

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Influence of oxygen precipitates on the measurement of minority carrier diffusion length in p-type silicon material using surface photovoltage technique

Ma, Yi, Lee, J. L., Benton, Janet, Boone, T., Eaglesham, David J., Higashi, G. S., DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 332 KB

english, 1997

25

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - In-line testing of antenna-type test structures for separation of sources of process-induced damage

Brozek, Tomasz, Roberts, Douglas, Dao, Thuy, DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 524 KB

english, 1997

26

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Room-temperature luminescence diagnostics in polycrystalline silicon

Koshka, Yaroslav, Ostapenko, Sergei, Jastrzebski, Lubek, Cao, J., Kalejs, Juris P., DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 207 KB

english, 1997

27

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Novel method to calculate the probability of silicon damage of DRAM based on the process control capability

King, Mingchu, Leu, Jen-Chih, Chen, Shih-Shiung, Chao, Ying-Chen, DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 293 KB

english, 1997

28

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Low-temperature photoluminescence characterization of impurity-doped GaAs and silicides prepared by molecular beam epitaxy, high-energy ion implantation, and combined ion-beam and molecular beam epi

Makita, Yunosuke, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 818 KB

english, 1996

29

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - New aspects of optical scatterometry applied to microtechnology

Bischoff, Joerg, Hutschenreuther, Lutz, Truckenbrodt, Horst, DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 1.01 MB

english, 1997

30

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Implementing surface photo-voltage in manufacturing

Simard-Normandin, Martine, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 705 KB

english, 1996

31

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Stark effect: a novel method of characterization of low-dimensional heterostructure semiconductor lasers

Gopalam, B. S. V., DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 790 KB

english, 1996

32

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Semiconductor surface superlattice symmetry type evaluation

Kornienko, Yuri, Fedtchouk, Alexander P., Rudenko, Ruslana A., DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 211 KB

english, 1996

33

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing - Practical, nondestructive method to profile near-surface and subsurface defects in semiconductor wafers

Nokes, Mark A., Flesher, Pamela, Borden, Peter, DeBusk, Damon K., Lowell, John K., Hill, Dale E., Allen, Gary, Mathur, Jagdish P., Lowell, John K., Chen, Ray T.

Year:

1994

Language:

english

File:

PDF, 487 KB

english, 1994

34

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Nematic thin layer self-organization caused by semiconductor surface superlattice

Fedtchouk, Alexander P., Rudenko, Ruslana A., Shevchenko, Larisa D., Kornienko, Yuri, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 206 KB

english, 1996

35

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Molecular and ionic contamination monitoring for cleanroom air and wafer surfaces

Sun, Peng, Adams, Marty, Shive, Larry, Pirooz, Saeed, DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 322 KB

english, 1997

36

Deposition of Ca+, Na+, Al+, K+ on Single-Crystal Si From DIH20: NH40H: H202 and DIH20: HCL: H202 as Analyzed by ToF-SIMS and SPV

Debusk, Damon, Lowell, John, Reich, Fraser

Journal:

MRS Proceedings

Year:

1995

Language:

english

File:

PDF, 1.16 MB

english, 1995

37

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Electron emission phenomena controlled by a transverse electric field in compound emitters

Olesik, Jadwiga, Calusinski, Bogdan, Olesik, Zygmunt, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 225 KB

english, 1996

38

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Optical field effect transistor with an indium tin oxide gate electrode

Fodje, J. B., Mukherjee, D., Hogarth, Cyril A., DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 172 KB

english, 1996

39

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Polymer waveguide-based 1-GHz clock signal distribution system

Li, Ting, Tang, Suning, Li, Feiming, Dubinovsky, Michael, Wu, Linghui, Wickman, Randy W., Chen, Ray T., DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 417 KB

english, 1996

40

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Automated visual inspection stations for next-generation semiconductor package quality control

DeYong, Mark R., Eskridge, Thomas C., Grace, John W., Newberry, Jeff E., Jones, J. H., Hart, B. E., DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 519 KB

english, 1996

41

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Morphology, composition, and properties of the amorphous hydrogenated carbon (C:H) films

Ligachov, Valerie A., Popov, Anatolyi I., Stuokach, Sergei N., DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 460 KB

english, 1996

42

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Optical characterization of amorphous and polycrystalline silicon films

Ibok, Effiong, Garg, Shyam, Li, George G., Forouhi, A. Rahim, Bloomer, Iris, Ager III, Joel W., DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 230 KB

english, 1996

43

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Monitoring process-induced oxide breakdown and its correlation to interface traps

Balasinski, Artur P., Hodges, R., Walters, J., Spinner III, Charles R., DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 909 KB

english, 1997

44

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Formation of oxygen-related donors during transition from thermal donors to new donors in CZ-silicon

Singh, Shyam, Prakash, Om, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 724 KB

english, 1996

45

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing - Mobile charge testing of sodium-contaminated thermal oxides using corona temperature stressing

Hoff, Andrew M., DeBusk, Damon K., DeBusk, Damon K., Ajuria, Sergio A.

Year:

1997

Language:

english

File:

PDF, 511 KB

english, 1997

46

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Study of cathodoluminescence spectroscopy of aluminum nitride

Hossain, Fazla R. M., Tang, Xiao, Wongchotigul, Kobchat, Spencer, Michael G., DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 165 KB

english, 1996

47

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Novel double-focus interferometer for scanning force microscope

Zhuo, Yongmo, Mou, Xu-Dong, Yang, Yongying, Cao, Bin, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 464 KB

english, 1996

48

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Metal-induced charge and growth rate of ultrathin thermal oxide films grown on Al or Fe contaminated Si (100) surfaces

Shimizu, Hirofumi, Shull, Alison, Munakata, Chusuke, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 405 KB

english, 1996

49

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Grating-based surface-normal optoelectronic interconnects on Si substrate

Li, Feiming, Dubinovsky, Michael, Ershov, Oleg A., Wu, Linghui, Li, Ting, Tang, Suning, Chen, Ray T., DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 436 KB

english, 1996

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